Design and Fabrication of Micro/Nano Sensors and Actuators
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, whose mechanical and electrical properties have had a great influence on their working characteristics, including accuracy, sensitivity, and working range. In addition, the design and fabrication method can directly affect the reliability of these MEMS and NEMS devices, especially their lifetime, robustness, and stability under extreme conditions of shock, temperature, humidity, irradiation, chemical exposure, or other challenges.
This Special Issue focuses on the structural design and optimization, system modeling and simulation, manufacturing, in situ characterization, and testing technologies of micro/nano-sensors and -actuators, providing research references for the further development and application of MEMS/NEMS devices. .
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