Advances in Thin Film Fabrication by Magnetron Sputtering
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Developments are due to the modifications introduced into the sputtering technology itself (e. g.
, the use of innovative plasma sources, innovative technical means for influencing the state of the magnetron plasma, innovative approaches to the plasma's state and its control) and the production of new coating materials with functional properties that enable them to meet the needs of the modern industry. This reprint aims to present a collection of ideas describing recent advances in thin-film manufacturing technology, focusing on the influence of magnetron sputtering modification on the film synthesis conditions, parameters, and properties of the films that are produced.
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